MEMS for large area and flexible applications

Year 2009
Project team Vladimir Bulovic

Flexible, multi-sensor arrays

There are many applications for micro-electromechanical systems (MEMS) in large area applications for sensing and actuation that are cost prohibitive with current silicon wafer-based MEMS devices. This project will develop flexible, paper-thin multi-sensor arrays of unconventional MEMS. The technology will enable economical full field sensing or actuation over an entire surface, leading to new applications in aerospace, automotive, biomedical, and energy markets.