A 3-dimensional lithographic microfabrication system
Year
2008
Project team
Peter So
![](https://deshpande.mit.edu/wp-content/uploads/2021/12/Project-default-aspect-ratio-580-360-75-580x360-c-default.jpg)
Photolithography
The efficiency of photolithography for 2D microfabrication is responsible for ushering in the microelectronics era. This project will use a novel 3D photolithography technique that is based on novel focusing of ultrafast light pulses to develop a new type of 3D microfabrication system. This would allow high-resolution structures to be built rapidly. These structures could be used in fields including data storage, photonic devices, microfluidics, and tissue engineering.