MEMS for Large Area and Flexible Applications

Vladimir Bulovic

There are many applications for (MEMS) in large area applications for sensing and actuation that are cost prohibitive with current silicon wafer based MEMS devices. This project will develop flexible, paper-thin multi-sensor arrays of unconventional MEMS. The technology will enable economical full field sensing or actuation over an entire surface, leading to new applications in aerospace, automotive, biomedical, and energy markets.