A 3 Dimensional Lithographic Microfabrication System

Peter So

The efficiency of photolithography for 2D microfabrication is responsible for ushering in the microelectronics era. This project will use a novel 3D photolithography technique that is based on novel focusing of ultrafast light pulses to develop a new type of 3D microfabrication system. This would allow high-resolution structures to be built rapidly. These structures could be used in fields including data storage, photonic devices, microfluidics, and tissue engineering.